发明名称 METHOD FOR PRODUCING HARD COAT
摘要 PROBLEM TO BE SOLVED: To improve the oxidation resistance and abrasion resistance of a hard coat by applying at least two physical vapor deposition sources with different plasma densities to the surface of a substrate. SOLUTION: The method for producing a hard coat is used for forming a hard coat by coating the surface of a substrate by using at least two physical vapor deposition sources with different plasma densities, wherein when observed with an electron microscope, the hard coat is composed of a plurality of layers, the first of which is formed from an evaporation source with a high plasma density and has undergone continuous crystal growth, and the second of which is formed from an evaporation source with a low plasma density, and in which the first layer and the second layer are formed without forming any interface therebetween. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006002227(A) 申请公布日期 2006.01.05
申请号 JP20040181342 申请日期 2004.06.18
申请人 HITACHI TOOL ENGINEERING LTD 发明人 KUBOTA KAZUYUKI
分类号 C23C14/22;B23B27/14;B23P15/28;C23C14/06 主分类号 C23C14/22
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