发明名称 |
Built in purifier for reactive gases |
摘要 |
The present invention is an apparatus for containing and dispensing a high purity fluid comprising an outer vessel capable of containing a quantity of high purity fluid in its interior; an outlet associated with the outer vessel for dispensing the high purity fluid; a valve capable of controlling high purity fluid flow out of the outer vessel through the outlet; an inner vessel at least partly situated in the outer vessel and communicating with the outlet and an inlet which communicates with the interior of the outer vessel; a purification media contained within the inner vessel for purifying the high purity fluid of undesired components; and fluid flow control device which prevents high purity fluid from flowing from the inner vessel to the interior of the outer vessel.
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申请公布号 |
US2006000850(A1) |
申请公布日期 |
2006.01.05 |
申请号 |
US20040884824 |
申请日期 |
2004.07.02 |
申请人 |
VINCENT JEAN L;PEARLSTEIN RONALD M;BERGER KERRY R;LACHAWIEC ANTHONY J JR |
发明人 |
VINCENT JEAN L.;PEARLSTEIN RONALD M.;BERGER KERRY R.;LACHAWIEC, ANTHONY J.JR. |
分类号 |
B67D99/00;B01D35/02;B01D46/00;F17C7/02;F17C13/00 |
主分类号 |
B67D99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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