Plasma electrode for use in pressure chamber of parallel plate-reactor, has electrically conductive box with base, which includes hole and gas permeable layer that is arranged opposite to base and is connected with box

摘要

The electrode (100) has an electrically conductive box with a base, which includes a hole and a gas permeable layer (104), which is electrically conductive. The gas permeable layer is arranged opposite to the base in the box and is connected with the box. The gas permeable layer has a layer of electrically conductive grains that are partially arranged and are made of graphite and aluminium. Independent claims are also included for the following: (A) a method for producing a gas permeable plasma electrode (B) a parallel plate-reactor with a pressure chamber having a plasma electrode.