| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet light unit high in safety by avoiding leakage of an inert gas to the working environment as much as possible. SOLUTION: This ultraviolet light unit 1 has a vessel 3 for containing the inert gas which is heavier than air, and an irradiation object 5 accommodated in the vessel 3 is irradiated with ultraviolet light. The vessel 3 comprises a bottom wall 7, a tubular inner wall 9 erected on the bottom wall 7 and a tubular outer wall 11 externally surrounding the inner wall 9. The inner wall 9 has an opening 15 formed in a position downward of its top end by a specified distance, and an exhausting blower 29 as an exhausting means is connected with an outer space 31 formed between the inner wall 9 and the outer wall 11. COPYRIGHT: (C)2006,JPO&NCIPI
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