| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the manufacturing method and manufacturing device of a solar cell capable of easily grasping the progressive condition of sulfiding or selenide processing in forming a p-type semiconductor layer by performing the sulfiding or selenide processing. <P>SOLUTION: When the compound semiconductor solar cell provided with the p-type semiconductor layer comprising CuLnS<SB>2</SB>or CuInSe<SB>2</SB>that a precursor where a copper (Cu) layer and an indium (In) layer are laminated is formed by heat treatment in a hydrogen sulfide atmosphere or a hydrogen selenide atmosphere and a n-type semiconductor layer formed by being closely attached to one side of the p-type semiconductor layer on an electrode layer formed on one side of a substrate is manufactured, a partial pressure of hydrogen gas generated by a reaction is measured to perform the heat treatment while monitoring the progressive condition of the reaction of hydrogen sulfide or hydrogen selenide with Cu and In. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
