| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying device capable of partitioning a space in the device before and after drying, and preventing the impairing of quality by inhibiting floating and attachment of very little liquid droplets and fine particles to a washed object after drying. SOLUTION: This device for drying a thin film or thin plate-shaped washed object 1 after wet washing, comprising a gas jetting means 13 for jetting gas from upper and lower parts during conveying the washed object 1 by a plurality of rollers 11 arranged in the device to dry the washed object, further comprises an air supply part 14 extended between a first room 10a for carrying the washed object 1 in the device, allowing the washed object 1 to pass through between upper and lower parts of the gas jetting means 13 and jetting gas, and a second room 10b for carrying out the washed object 1 after jetting gas, provided with a partitioning plate 12 for partitioning the rooms in a state of remaining a transfer port 13a between the upper and lower parts of the gas jetting means 13 through which the washed object 1 is passed, and supplying the clean air to the second room 10b toward the washed object 1 through a precision filter. COPYRIGHT: (C)2006,JPO&NCIPI
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