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发明名称
Beleuchtungseinrichtung für ein DUV-Mikroskop
摘要
申请公布号
DE50011735(D1)
申请公布日期
2006.01.05
申请号
DE20005011735
申请日期
2000.05.27
申请人
LEICA MICROSYSTEMS SEMICONDUCTOR GMBH
发明人
DANNER, LAMBERT;VOLLRATH, WOLFGANG;EISENKRAEMER, FRANK;OSTERFELD, MARTIN;VEITH, MICHAEL
分类号
G02B5/26;G02B5/28;G02B21/06;G02B21/16
主分类号
G02B5/26
代理机构
代理人
主权项
地址
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