发明名称 SINGLE CRYSTAL MAGNESIUM OXIDE SINTERED COMPACT, ITS PRODUCTION METHOD AND PROTECTIVE FILM FOR PLASMA DISPLAY PANEL
摘要 <P>PROBLEM TO BE SOLVED: To provide a single crystal MgO sintered compact used as a target material for depositing an MgO film on a substrate using an electron beam deposition method, without reducing the density and spatter resistance of the obtained MgO film, which has excellent film properties, and, when used, e.g., as a PDP (Plasma Display Panel) protective film, has improved discharge properties or the like, to provide a method for producing the single crystal MgO sintered compact, and to provide a PDP protective film obtained by using the single crystal MgO sintered compact as a target material. <P>SOLUTION: The single crystal magnesium oxide sintered compact has a relative density of 50 to <90%, has a magnesium oxide purity of &ge;97 mass%, and also comprises coarse grains with a grain size of &ge;200 &mu;m. The protective film for a plasma display panel is produced by an electron beam deposition method, an ion irradiation deposition method, or a sputtering method using the single crystal magnesium oxide sintered compact as a target material. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006002208(A) 申请公布日期 2006.01.05
申请号 JP20040179114 申请日期 2004.06.17
申请人 TATEHO CHEM IND CO LTD 发明人 KAWASHIMA HIROTAKA;KUNISHIGE MASAAKI;YAMAMOTO KAORI
分类号 C23C14/34;C04B35/053;H01J9/02;H01J11/02;H01J11/22;H01J11/34;H01J11/40 主分类号 C23C14/34
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