| 摘要 |
An object of the present invention is to obtain uniform shape of a thin film of an electronic device having a thin film. The present invention comprises the steps of: forming an substantially linear droplet pattern by applying an ink-jet head having a plurality of nozzles which discharge a droplet of a solvent containing a functional thin-film material to provide a substrate with droplets from at least part of a plurality of the nozzles; and drying the droplets which have been provided on the substrate, the drying step is performed by intake-exhaust means which is positioned in a direction orthogonal to the substantially linear droplet pattern from the ink-jet head and which has an exhaust opening wider than the approximate linear droplet pattern.
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