| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure system capable of treating a plurality of kinds of processings in orders proper to the kinds and a technique regarding the exposure system. <P>SOLUTION: The exposure system has a first control unit controlling the input information of the contents of the first kind of the processing and a second control unit controlling the input information of the contents of the second kind of the processing. The exposure system further has a control unit conducting the executive control of the processing corresponding to either of the contents of the first kinds of the processing and the contents of the second kind of the processing on the basis of the informations controlled by the first and second control units. The control unit decides whether or not the processing corresponding to the contents of the second kind of the processing controlled by the second control unit can be transferred to the executive control on the basis of the information controlled by the first control unit. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
