| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a device by which the productivity of a panel can be improved by stabilizing the arrangement accuracy of panels of all substrate in a cassette and production lines can be operated without lowering throughput in a photolithography line for manufacturing liquid crystal panels or the like through a plurality of connected exposure devices. <P>SOLUTION: In the photolithography line with a plurality of connected exposure devices, all substrates in one cassette are exposed in the same exposure device. In case when a plurality of cassettes are put into the photolithography line, substrates in the cassettes are fed into the line at the same time, and all substrates in one cassette are controlled to be exposed in the same exposure device. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
