SUBSTRATE CARRYING DEVICE AND SUBSTRATE TREATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate carrying device and a substrate treating device capable of easily positioning substrates which are the objects to be carried relative to each carrying reference position of a plurality of stages of substrate carrying lines. SOLUTION: An elevating conveyor 30 performs elevating movements between an upper stage carrying line UT and a lower stage carrying line LT. In order to cope with deviations in carrying reference positions between both carrying lines, an upper positioning section 40 and lower positioning section 50 are each provided at the upper stage carrying line UT and the lower stage carrying line LT, and the elevating conveyor 30 is positioned at the carrying reference positions of each transfer line by engaging spherical projection members 46, 56 accurately fine controlled in advance with a first conical block 71 and a first V block 72 fixedly provided at the elevating conveyor 30 when the elevating conveyor 30 is positioned at the upper stage carrying line UT or the lower stage carrying line UT. COPYRIGHT: (C)2006,JPO&NCIPI