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发明名称
Electrically enhanced surface planarization
摘要
A substrate processing apparatus equipped to employ electrical potential to assist in planarization and/or conditioning is provided.
申请公布号
US2006003670(A1)
申请公布日期
2006.01.05
申请号
US20040883499
申请日期
2004.06.30
申请人
GOLZARIAN REZA M
发明人
GOLZARIAN REZA M.
分类号
B24B37/04
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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