发明名称 APPARATUS AND METHOD FOR IMAGE PROCESSING, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an image processing technology which is capable of restraining a target region in a target image from being incorrectly recognized. <P>SOLUTION: An image processing apparatus is used for obtaining the position of a target object in the target image. The apparatus is equipped with a first computing means which calculates the degree of similarity of each of the corresponding partial regions concerning partial images and reference images in the target image, a second computing means which calculates the statistics of the degrees of similarity of the partial images calculated by the first computing means, and a recognizing means which recognizes the position of the partial image in the target image corresponding to the maximum value out of the statistics calculated by the second computing means as the position of the target object. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006005242(A) 申请公布日期 2006.01.05
申请号 JP20040181470 申请日期 2004.06.18
申请人 CANON INC 发明人 MIYASHITA TOMOYUKI
分类号 H01L21/027;G01B11/00;G03F9/00;G06K9/00;G06K9/64;G06T1/00;G06T7/60 主分类号 H01L21/027
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