| 摘要 |
An optical system for use in measurements in a sample comprising a light source ( 102 ) operable to produce an incident light beam propagating in a certain direction towards the sample (S) through an illumination channel (IC), a detector unit ( 104 ) for collecting light coming from the sample through a detection channel (DC), and generating data indicative of the collected light, a light directing assembly ( 106 ) operable to direct the incident beam onto a certain location on the sample's plane with a plurality of incident angles, and to direct light returned from the illuminated location to the detector unit ( 104 ), the light directing assembly ( 106 ) comprising a plurality of beam deflector elements ( 108 A-D), at least one of the deflector elements being movable and position of said at least one movable deflector element defining one of the selected incident angles.
|
