发明名称 Split gate type flash memory device and method of manufacturing the same
摘要 In a split gate type flash memory device, and a method of manufacturing the same, the device includes a memory cell array having a memory cell uniquely determined by a contact of a corresponding bit line and a corresponding word line, a floating gate formed on a semiconductor substrate to constitute the memory cell, the floating gate having a horizontal surface parallel to a main surface of the substrate, a vertical surface perpendicular to the main surface of the substrate, and a curved surface extending between the horizontal and vertical surfaces, a control gate formed over the curved surface of the floating gate in an area defined by an angle range of less than 90° between an extension line of the horizontal surface and an extension line of the vertical surface, and source and drain regions formed in an active region of the substrate.
申请公布号 US2006001077(A1) 申请公布日期 2006.01.05
申请号 US20050152779 申请日期 2005.06.15
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 RYU EUI-YOUL;KWON CHUL-SOON;KIM JIN-WOO;KIM YONG-HEE;KIM DAI-GEUN;KIM JOO-CHAN
分类号 H01L29/788;H01L21/8238;H01L21/8247;H01L27/115 主分类号 H01L29/788
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