发明名称 Phase-change random access memory device and method for manufacturing the same
摘要 Disclosed are a phase-change random access memory device and a method for manufacturing the same, capable of improving a driving speed of the phase-change random access memory by reducing a contact surface between a bottom electrode and a phase-change layer. The phase-change random access memory device includes a first insulation layer formed on a semiconductor substrate and having a first contact hole for exposing a predetermined portion of the semiconductor substrate, a bottom electrode contact for filling the first contact hole, a first bottom electrode formed on the first insulation layer, a second bottom electrode spaced from the first bottom electrode by a predetermined distance, a second insulation layer formed on the first insulation layer, a phase-change layer pattern for filling the second contact hole, and a top electrode formed on the phase-change layer pattern.
申请公布号 US2006003470(A1) 申请公布日期 2006.01.05
申请号 US20040999545 申请日期 2004.11.30
申请人 CHANG HEON Y 发明人 CHANG HEON Y.
分类号 H01L21/00 主分类号 H01L21/00
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