发明名称 ANODIZATION DEVICE AND END POINT DETECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an anodization device wherein the thickness of an anodized coating formed on the electrode pattern of an elastic surface wave resonance piece is made constant, and further, the resonance frequency of the elastic surface wave resonance piece is made constant, and to provide an end point detection method. SOLUTION: The anodization device 10 comprises: a power source control part 20 where the value of voltage to be applied to a work is obtained in accordance with the thickness of an anodized coating formed on the work, and further, end point current set value at which anodization is finished is obtained from the above voltage value; a power source part 18 where the voltage in the value obtained in the power source control part 20 is applied to the work dipped into an electrolytic solution in an anodization tank 12, and the feed of a power source to the work is controlled by the power source control part 20; and a monitor part 24 where the value of the electric current fed to the work is monitored, and further, when the above current value falls below the above end point current set value, it is judged as the end point of the anodization. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006002173(A) 申请公布日期 2006.01.05
申请号 JP20040176918 申请日期 2004.06.15
申请人 SEIKO EPSON CORP 发明人 MITSUI YUJI
分类号 C25D11/32;H01L21/283;H03H3/10 主分类号 C25D11/32
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