MINIATURE LAMELLAR GRATING INTERFEROMETER BASED ON SILICON TECHNOLOGY

摘要

A lamellar grating interferometer is described, in which the light beams are collimated and focused onto the grating by means of mirror 9, which at the same time serves for collecting the light reflected from the grating. In this case, the light beam of a white light source 1 is first collimated by means of first lens 2, and sunsequently passed through a sample cuvette 3. The transmitted light beam is subsequentlyy focused and coupled by another lens 2 into a fibre 17. The light to this fibre 17 is subsequentlyy directed towards a mirror 9, reflected from this mirror 9 onto a grating 11, which forms part of a lamellar grating interferometer which is realised by means of a micro electro mechanical device MEMS 7, which is mounted on a MEMS holder 6, as is the fibre 17. The light reflected from this grating 11 is reflected onto the same mirror 9, and focused and coupled by this same mirror 9 into a second multimode fibre 18, which is also fastened to the holder 6. The light guided by this second multimode fibre 18 is subsequently fed into a detection device 4.