MANUFACTURING METHOD OF FINE STRUCTURE AND MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a new manufacturing method and a new manufacturing device manufacturable with arbitrary materials and crystallinity while controlling a position and a size freely in the fine structure of the same size (nanometer order) with an object manufactured by a gas deposition method using an electron ray. SOLUTION: After irradiating an electron ray toward a desired position on a material and forming a mask while passing on the material the gas containing elements used as the materials of the mask, micro-processing is performed to the material so that materials other than the portion covered with the mask may be removed by irradiating an energy beam. COPYRIGHT: (C)2006,JPO&NCIPI