| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligned substrate which can be stably judged whether segmentation of the substrate is appropriately performed or not. SOLUTION: The aligned substrate 1 comprising a pair of substrates aligned to each other is segmented along a scribe line to form one or more cells. At least one substrate of the pair of substrates has at least two marks 6a, 6d formed interposing a setting line 4a in a plan view. The distance d1 between at least two marks 6a, 6d in the direction approximately orthogonal to the extended direction of the setting line 4a is approximately equal to the permissible deviation amount of the scribe line. COPYRIGHT: (C)2006,JPO&NCIPI
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