发明名称 Die identification systems and methods
摘要 Systems and methods are disclosed herein to provide die identification. For example, in accordance with an embodiment of the present invention, a wafer patterning technique is disclosed that provides multiple-exposure patterning to provide a unique identifying mark for each die on a wafer.
申请公布号 US2006003234(A1) 申请公布日期 2006.01.05
申请号 US20040883316 申请日期 2004.06.30
申请人 INDIGO SYSTEMS CORPORATION AND AMI SEMICONDUCTOR 发明人 WOOLAWAY JAMES T.;KINCAID GLENN T.;KURTH ERIC A.;ZAUSCH ROBERT F.;WILLIAMS GLENN E.
分类号 G03C5/00;G03F1/00;G03F9/00;H01L23/544 主分类号 G03C5/00
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