发明名称 |
Die identification systems and methods |
摘要 |
Systems and methods are disclosed herein to provide die identification. For example, in accordance with an embodiment of the present invention, a wafer patterning technique is disclosed that provides multiple-exposure patterning to provide a unique identifying mark for each die on a wafer.
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申请公布号 |
US2006003234(A1) |
申请公布日期 |
2006.01.05 |
申请号 |
US20040883316 |
申请日期 |
2004.06.30 |
申请人 |
INDIGO SYSTEMS CORPORATION AND AMI SEMICONDUCTOR |
发明人 |
WOOLAWAY JAMES T.;KINCAID GLENN T.;KURTH ERIC A.;ZAUSCH ROBERT F.;WILLIAMS GLENN E. |
分类号 |
G03C5/00;G03F1/00;G03F9/00;H01L23/544 |
主分类号 |
G03C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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