| 摘要 |
<p>In a heated tank (4), a liquid having Sn solid fine particles dispersed in a resin is stored. The resin pressurized by a pressurizing pump is lead to a nozzle (1), and the resin in a liquid state is jetted from a leading edge of the nozzle (1) provided in a vacuum chamber (7). The liquid in a liquid state jetted from the nozzle (1) forms a spherical shape by surface tension, cooled in vacuum to be solidified, and becomes a solid target (2). The vacuum chamber (7) is provided with a laser introducing window (10) for introducing laser beams. The laser beams emitted from a laser light source (8) arranged outside the vacuum chamber (7) are collected by a lens (9), introduced into the vacuum chamber (7) to have the target in a plasma state, and EUV light is generated.</p> |
