PLASMA GENERATOR, IN VIVO PLASMA PROCESSING DEVICE USING SAME, AND SURFACE PROCESSING DEVICE

摘要

Disclosed is a nonequilibrium microplasma generator which can be easily brought into various environments and enables to perform a process using a plasma or the like. Such a nonequilibrium microplasma generator comprises a cylindrical plasma torch (10) having a size from 10 mm to 5 µm and composed of a flexible dielectric material, a plasma gas supply unit (12) for supplying a plasma gas into the plasma torch (10), a high-frequency electrode (16) disposed on the inner side of the plasma torch (10) near the front end, a ground electrode (18) disposed on the outer side of the plasma torch (10), a high-frequency power supply (20) for supplying a high-frequency power between the electrodes, and a flexible tube (14) connecting the plasma gas supply unit (12) with the plasma torch (10) for supplying a plasma gas.