FIXTURE CHARACTERISTIC MEASUREMENT DEVICE, METHOD, PROGRAM, RECORDING MEDIUM, NETWORK ANALYZER, AND SEMICONDUCTOR TEST DEVICE

摘要

It is possible to measure the characteristic of a jig (fixture) used when calculating/measuring a circuit parameter of a device under test (DUT). A jig characteristic measurement device measures jig characteristic of a jig (3) having signal lines (3a, 3b, 3c, 3d) for connecting a DUT (2) to a network analyzer (1) (i.e., reflection characteristics of the signal lines 3a, 3b, 3c, 3d, the transmission S parameter, etc.). The reflection coefficients of the signal lines 3a, 3b, 3c, 3d are measured when the DUT (2) is in the open state not connected to the signal lines 3a, 3b, 3c, 3d, and the reflection coefficients of the signal lines 3a, 3b, 3c, 3d are measured when the signal lines 3a, 3b, 3c, 3d are grounded to be in the short-circuited state. According to the measurement results, the jig characteristic of the jig (3) is acquired.