发明名称 |
TUBULAR CONTAINER MADE OF CARBON |
摘要 |
It is an object of the present invention to prevent leakage of a raw material gas or molten silicon in a carbon columnar container which is constructed by connecting plural carbon cylindrical members to each other by a screw portion provided along the periphery of an end of each of the cylindrical members, by sealing a gap present at the connection portion through a high-reliability method that causes no cracking or the like. The carbon columnar container of the invention is a carbon columnar container constructed so as to form a multistage structure by connecting plural carbon cylindrical members to each other by a screw portion provided along the periphery of an end of each of the cylindrical members, wherein each of the cylindrical members connected to each other has such a ring-shaped plane extending from the inner peripheral wall in the diameter direction as to form a ring-shaped butt area on the inner peripheral wall side when the cylindrical members are connected, and the sum of surface roughness (Ra) of the ring-shaped planes to form the butt area is in the range of 1 to 100 µm. |
申请公布号 |
CA2572194(A1) |
申请公布日期 |
2006.01.05 |
申请号 |
CA20052572194 |
申请日期 |
2005.06.23 |
申请人 |
TOKUYAMA CORPORATION |
发明人 |
NAKASHIMA, JUNICHIROU;SAKITA, MANABU;SUGIMURA, SHIGEKI;ODA, HIROYUKI |
分类号 |
C01B33/027;B22D21/00;B22D25/04;F27D5/00;H01L21/02 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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