| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device with a conveying structure improved. SOLUTION: The substrate conveying device is constituted of a base portion 20, a moving portion 30 which is installed on the base portion 20 so that it moves linearly and which includes a rotor 32, a pair of frame portions 40a, 40b which are provided in parallel at both sides of the moving portion 30 with the heights being adjustable, and a conveying portion 50 which is connected between a pair of the frame portions 40a, 40b and which moves linearly in the vertical direction, interlocked with height control action of the frame portion 40, by which a substrate, especially a larger substrate being transferred simply and precisely, in a state where structural safety is secured. COPYRIGHT: (C)2006,JPO&NCIPI
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