| 摘要 |
PROBLEM TO BE SOLVED: To establish the method of calculating the curvature radius of each of the tips of recesses and protrusions in the texture of a substrate. SOLUTION: AFM measured data is smoothed by weighted movement averaging for weighting points to obtain an average. Protrusions and recesses are detected from the inclinations of two points in the adjacent 3 data of the smoothed data. In each of the tips of the detected protrusions and recesses, a curvature radius is calculated from the 3 data including each point before/after the tip by using circle equation. There is a strong correlation between the calculated curvature radiuses Rcp and Rcv of the protrusion and recess tips and OR. COPYRIGHT: (C)2006,JPO&NCIPI
|
