| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device which realizes higher accuracy and higher productivity by suppressing vibration and deformation of a main body fixed panel system without providing any new attenuation mechanism in the exposure device. <P>SOLUTION: In a moving apparatus inside an exposure device, the moving apparatus is driven so as to invert its phase with respect to fixed panel vibration in order to reduce vibration and deformation caused by scan driving in a main body fixed panel, while the moving apparatus is moved and positioned perpendicularly with a scanning direction in the next exposure area after one time of scan exposure process. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
