| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the power consumption of a chamber incorporated in an apparatus to reduce the power consumption of the entire apparatus. <P>SOLUTION: The temperature adjusting apparatus having a cooling type temperature adjuster on a first stage and a heating type temperature adjuster on a second stage controls the cooling capacity of the cooling type temperature adjuster on the first stage according to a heating type temperature adjuster output instruction value of the heating type temperature adjuster on the second stage. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
