| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner capable of ensuring almost a proper exposure for a plurality of patterns with different pitches formed on a photosensitizer in the state of S polarization. <P>SOLUTION: The aligner forms an image of the patterns on an original plate (M) to be projected onto the photosensitizer (W) by a projection optical system (PL). The aligner is provided with illumination systems (1 to 15) for illuminating the original plate to be projected so that at least parts of the patterns among the patterns on the original plate to be projected are formed on the photosensitizer in a prescribed polarization state, and a luminous quantity control means (20) for controlling the luminous quantity, whereby at least the parts of the patterns reach the image forming region on the photosensitizer, in response to the characteristics of the parts of the patterns. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
