METHOD FOR TREATING AN EXHAUST GAS

摘要

The present invention relates to a method and apparatus for treating an exhaust gas containing a fluorine compound. A method according to the present invention includes heating the exhaust gas in the presence of O₂, and then adding H₂O to the exhaust gas to decompose or oxidize the fluorine compound. An apparatus according to the present invention includes a heating section ( 30 ) for heating the exhaust gas, an exhaust gas supply ( 11 ) for supplying the exhaust gas to the heating section ( 30 ), an H₂O adding section ( 40 ) located just downstream of the heating section ( 30 ) for adding H₂O to the exhaust gas by supplying H₂O or H₂ to the exhaust gas; and an acid gas removal section ( 13 ) for removing an acid gas produced by a reaction between the exhaust gas and H₂O.