Composition for stripping and cleaning and use thereof
摘要
<p>A composition comprising one or more water soluble organic solvents comprising a glycol ether; water; a fluoride containing compound provided that if the fluoride containing compound is ammonium fluoride than no additional fluoride containing compound is added to the composition; optionally a quaternary ammonium compound; and optionally a corrosion inhibitor is disclosed herein that is capable of removing residues from an article such as photoresist and/or etching residue. Also disclosed herein is a method for removing residues from an article using the composition disclosed herein.</p>
申请公布号
EP1612858(A2)
申请公布日期
2006.01.04
申请号
EP20050014089
申请日期
2005.06.29
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
EGBE, MATTHEW I.;LEGENZA, MICHAEL;WIEDER, THOMAS;RIEKER, JENNIFER M.