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发明名称
METHOD FOR IN-SITU MONITOR AND CONTROL OF FILM THICKNESS AND TRENCH DEPTH
摘要
申请公布号
EP1611447(A1)
申请公布日期
2006.01.04
申请号
EP20040718815
申请日期
2004.03.09
申请人
VERITY INSTRUMENTS, INC.
发明人
KUENY, ANDREW, WEEKS
分类号
G01N21/55;G01B11/06;G01R31/312;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01N21/55
代理机构
代理人
主权项
地址
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