发明名称 |
Wavefront splitting element for EUV light and phase measuring apparatus using the same |
摘要 |
A wavefront splitting element includes a diffraction grating for splitting light into multiple beams including transmitting light and reflected light.
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申请公布号 |
US6982796(B2) |
申请公布日期 |
2006.01.03 |
申请号 |
US20030354657 |
申请日期 |
2003.01.30 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SATO RYUICHI |
分类号 |
G01B9/02;G01J3/18;G01J9/02;G02B5/18;G03F7/20;H01L21/027 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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