发明名称 |
Piezoelectric ink jet print head and fabrication method for a pressure chamber thereof |
摘要 |
A piezoelectric ink jet print head and a fabrication method for a pressure chamber thereof. A silicon substrate has at least one large-size opening. A photoresist layer is formed in the large-size opening of the silicon substrate and has a plurality of small-size trenches spaced apart from each other. Each of the small-size trenches serves as a pressure chamber. An adhesion layer is formed overlying the silicon substrate to cover the photoresist layer and the small-size trenches. A silicon layer is formed overlying the adhesion layer to serve as a vibrating layer.
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申请公布号 |
US6981300(B2) |
申请公布日期 |
2006.01.03 |
申请号 |
US20030653621 |
申请日期 |
2003.09.02 |
申请人 |
NANODYNAMICS INC. |
发明人 |
TSAI CHIH-CHANG;YANG MING-HSUN |
分类号 |
H04R17/00;B41J2/16 |
主分类号 |
H04R17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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