Method for controlling deflection of substrates by temperature

摘要

A substrate consisting of a plurality of individual substrates and a photo-curable adhesive layer interposed therebetween is irradiated by a curing light, and the deflection of the substrate is controlled by controlling the temperature. The step for controlling the deflection includes the steps of finding the temperature difference DeltaT between the temperature Th of a mounting table and the temperature Td of the substrates before curing; finding deflection difference DeltaX between the deflection X of the substrates after curing and the target deflection setting value Xt; finding the temperature Tc by Tc=DeltaT-MxDeltaX by using the constant of proportionality M; and controlling the temperatures of at least one of the substrates before curing and the mounting table according to the temperature Tc such that Tc=Th-Td.