发明名称 Method of forming a super-junction semiconductor device
摘要 In one embodiment, a transistor is formed to have alternating depletion and conduction regions that are formed by doping the depletion and conduction regions through an opening in a substrate of the transistor.
申请公布号 US6982193(B2) 申请公布日期 2006.01.03
申请号 US20040841670 申请日期 2004.05.10
申请人 SEMICONDUCTOR COMPONENTS INDUSTRIES, L.L.C. 发明人 HOSSAIN ZIA;VENKATRAMAN PRASAD
分类号 H01L21/332;H01L21/22;H01L21/331;H01L21/336;H01L21/38;H01L21/76;H01L21/8234;H01L29/06;H01L29/78 主分类号 H01L21/332
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