发明名称 Semiconductor devices including a silicide layer
摘要 Embodiments of the present invention include a method for manufacturing a semiconductor device and a semiconductor device, in which, when a DRAM and a MOS field effect transistor that becomes a component of a logic circuit are mix-mounted on the same chip, the DRAM and the MOS field effect transistor can be provided with designed performances. After a capacitor 700 of the DRAM is formed, silicide layers 19 a and 19 b are formed over N<SUP>+</SUP> type source/drain regions 41 c and 41 d of MOS field effect transistors 200 c, 200 d and 200 e that are located in peripheral circuit region 2000 and logic circuit region 3000.
申请公布号 US6982466(B2) 申请公布日期 2006.01.03
申请号 US20040805334 申请日期 2004.03.22
申请人 SEIKO EPSON CORPORATION 发明人 TSUGANE HIROAKI;SATO HISAKATSU
分类号 H01L21/20;H01L27/06;H01L21/8232;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L21/20
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