发明名称 Scanning acoustic microscopy
摘要 A system uses reflection mode acoustical scanning of an object to examine the internal characteristics of the object. The system includes a controller and a jig removably attached to the object. The jig includes an acoustic transducer assembly that is in communication with the controller, which controls the positioning of the acoustic transducer assembly. The jig is adapted to enable the controller to scan the acoustic transducer assembly over the object and to adjust the position of the acoustic transducer assembly during the scan to compensate for the contour of the scanned portion of the object.
申请公布号 US6981418(B1) 申请公布日期 2006.01.03
申请号 US20020159547 申请日期 2002.05.31
申请人 METSCAN TECHNOLOGIES, LLC 发明人 MUELLER DENNIS WILLIAM
分类号 G01N9/24;G01N29/04;G01N29/06;G01N29/22;G01N29/26;G01N29/265;G01N29/28;G01S15/89;G10K11/35;H01L41/04;H01L41/08 主分类号 G01N9/24
代理机构 代理人
主权项
地址