| 发明名称 |
Method and apparatus for fluid processing and drying a workpiece |
| 摘要 |
A method and apparatus for fluid processing a workpiece are described. A gas can be used to agitate a fluid to improve cleaning and/or rinsing of a workpiece surface. The gas can reduce surface tension of the fluid to promote improved contact of the fluid with a surface of the workpiece. The surface of the workpiece can be dried by flowing gas along a portion of the workpiece surface during or after draining of the fluid.
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| 申请公布号 |
US2005283993(A1) |
申请公布日期 |
2005.12.29 |
| 申请号 |
US20050155008 |
申请日期 |
2005.06.16 |
| 申请人 |
WU QUNWEI;KEIGLER ARTHUR;LIU ZHENQIU;HARRELL JOHN;BOWLER STEVE |
发明人 |
WU QUNWEI;KEIGLER ARTHUR;LIU ZHENQIU;HARRELL JOHN;BOWLER STEVE |
| 分类号 |
B08B3/00;B08B3/10;B08B3/12;B08B11/02;F26B3/00;F26B21/06;H01L21/00;H01L21/02;(IPC1-7):B08B3/00 |
主分类号 |
B08B3/00 |
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