发明名称 |
LOCALIZING A TEMPERATURE OF A DEVICE FOR TESTING |
摘要 |
Wafers or other structures comprising a plurality of dies or devices are tested at non-ambient temperatures by inducing a first heat flux through a substantial portion of a surface of the structure to modify a temperature of the structure and inducing a second heat flux through a local area of a surface of the structure, proximate the device under test, to modify the temperature of the device under test. |
申请公布号 |
WO2005124652(A2) |
申请公布日期 |
2005.12.29 |
申请号 |
WO2005US20962 |
申请日期 |
2005.06.14 |
申请人 |
CASCADE MICROTECH, INC.;MCFADDEN, BRUCE |
发明人 |
MCFADDEN, BRUCE |
分类号 |
G01R31/26;G01R31/28;G06F19/00;H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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