发明名称 |
Methods and apparatus for sealing a chamber |
摘要 |
In certain aspects, a load lock chamber is provided that includes a body having at least one sealing surface wall including a sealing surface. The sealing surface wall has an opening adjacent the sealing surface adapted to input or output a substrate. The body further includes a plurality of side walls. The load lock chamber also includes a top coupled to the body. The top includes one or more openings that divide the top into a first portion and a second portion. The load lock chamber further includes one or more top sealing members adapted to cover each opening of the top. Each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top. Numerous other aspects are provided.
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申请公布号 |
US2005285992(A1) |
申请公布日期 |
2005.12.29 |
申请号 |
US20050145018 |
申请日期 |
2005.06.02 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WHITE JOHN M.;KURITA SHINICHI;STERLING WILLIAM N.;TANASE YOSHIAKI |
分类号 |
B65G49/00;G02F1/1333;H01L21/00;H01L21/677;H01L21/68;(IPC1-7):G02F1/133 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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