Diamond-based microactuator for ink jet spray heads
摘要
The microactuator has a resistance layer of doped or graphite diamond with an area of less than 1 mm2 and with an electrical input lead and output lead. The microactuator is mounted on a thermally insulating layer.
申请公布号
DE19808326(B4)
申请公布日期
2005.12.29
申请号
DE19981008326
申请日期
1998.02.27
申请人
HOFER, EBERHARD P.;KOHN, ERHARD
发明人
HOFER, EBERHARD P.;KOHN, ERHARD;REMBE, CHRISTIAN;WIESCHE, STEFAN AUS DER;GLUCHE, PETER;LEUNER, RUEDIGER
