发明名称 |
Glass support system, method of supporting glass, and etching equipment using the same |
摘要 |
The present invention provides a glass support system, including methods and equipment for supporting a glass substrate on a column of air. The disclosed glass alignment equipment may be used to prevent or reduce defects or contamination on the surface of a glass substrate which may arise when the glass is aligned prior to etching. In particular, a support pin of the present invention may be used with an air circulation system to support or align glass over a column of air so as to reduce or prevent defects or contamination on the glass in dry etching processes used in the manufacturing of LCDs and other devices.
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申请公布号 |
US2005284577(A1) |
申请公布日期 |
2005.12.29 |
申请号 |
US20050159804 |
申请日期 |
2005.06.23 |
申请人 |
LG PHILIPS LCD CO., LTD. |
发明人 |
KWON HYUK M. |
分类号 |
B44C1/22;B65G49/06;C23F1/00;(IPC1-7):C23F1/00 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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