发明名称 ULTRASONIC PROCESS AND APPARATUS WITH PROGRAMMABLE SWEEP FREQUENCY
摘要 An ultrasonic generator includes a user interface adapted for a user to specify parameters that define a frequency range and a sweep rate for the driving signal, a programmable memory coupled to the user interface for storing the frequency range and sweep rate parameters, and an output circuit responsive to the frequency range and sweep rate parameters for generating the driving signal in the frequency range and at the sweep rate specified by the user. An ultrasonic process includes the steps of programming an ultrasonic generator with parameters specifying a frequency range and a sweep rate of a driving signal output by the generator to one or more ultrasonic transducers used in the ultrasonic process, storing the frequency range and sweep rate parameters in a memory or storage device, and generating a driving signal having a frequency within the specified frequency range and varying at the specified sweep rate.
申请公布号 WO2005124885(A2) 申请公布日期 2005.12.29
申请号 WO2005US20311 申请日期 2005.06.09
申请人 THE CREST GROUP, INC.;GOODSON, J., MICHAEL 发明人 GOODSON, J., MICHAEL
分类号 B06B1/02;B08B3/12;H01L41/08 主分类号 B06B1/02
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