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发明名称
BOWL FOR SPIN APPARATUS
摘要
申请公布号
KR20050122493(A)
申请公布日期
2005.12.29
申请号
KR20040047613
申请日期
2004.06.24
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
EUM, HO SUNG
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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