| 摘要 |
A transfer device has connecting stations atmospherically separated via the transfer device, in which the latter has several transfer chambers with loading openings in its housing, and with bays for substrates and gates/locks assigned to the loading apertures. The transfer chambers (2,3) of the transfer device are combined to form a structural unit which has a slide/guide (4) with its guide device, and with it axially separated partition floors (12-14), which form the axial boundary of the transfer chamber (2,3) and by the transfer chambers (2,3) of the transfer device each is connected to another station and its connecting atmosphere (10,12), by moving the slider/guide (4).
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