发明名称 |
MEMS gyroscope with horizontally oriented drive electrodes |
摘要 |
Devices and methods for reducing rate bias errors and scale factor errors in a MEMS gyroscope are disclosed. A MEMS actuator device in accordance with an illustrative embodiment of the present invention can include at least one substrate including one or more horizontal drive electrodes, and a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes. The horizontal drive electrodes and/or movable electrode can be configured to eliminate or reduce rate bias and scale factor errors resulting from the displacement of the movable electrode in the direction of a sense axis of the device.
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申请公布号 |
US2005284222(A1) |
申请公布日期 |
2005.12.29 |
申请号 |
US20040881499 |
申请日期 |
2004.06.29 |
申请人 |
JOHNSON BURGESS R;WEBER MARK W |
发明人 |
JOHNSON BURGESS R.;WEBER MARK W. |
分类号 |
B81B3/00;G01C19/56;G01P15/125;(IPC1-7):G01P15/125 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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