发明名称 Method of producing display using mask alignment method
摘要 A method of producing a display comprises the steps of: aligning a display substrate having a plurality of pixel patterns and a mask having a plurality of holes corresponding to the pixel patterns to measure the position between the holes of the mask and the pixel patterns of the display substrate before fixing the position between the mask and the substrate; fixing the position between the mask and the substrate and measuring the position between the holes and the pixel patterns in this situation to calculate shift levels of the position between the position measured in this step and the position measured in the first step; and adjusting the position between the mask and a second display substrate by feeding back the shift levels of the position calculated in the second step when aligning the mask and the second display substrate.
申请公布号 US2005287897(A1) 申请公布日期 2005.12.29
申请号 US20050159997 申请日期 2005.06.23
申请人 KYOCERA CORPORATION 发明人 TANAKA ATSUSHI;MURAYAMA KOJI
分类号 C23C14/04;H01J9/00;H01L51/00;H01L51/56;(IPC1-7):H01J9/00 主分类号 C23C14/04
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